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The answer is [URL="http://www.baolab.com"]Baolab Microsystems[/URL] which has today announced its NanoEMS technology to do just that, construct nanoscale Micro Electro Mechanical Systems (MEMS) within the structure of a CMOS wafer rather than building on the surface like current techniques. This, says Baolab, means that because it uses less process steps … |
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